Foreline, Exhaust &
Duct Management
We provide complete one-stop solutions to address clogging issues in the foreline and exhaust line generated from the production of semiconductor and FPD (flat panel display). Our products also allow our clients to measure and monitor the degree of deposited powder in the exhaust line and main duct.
All products can also be connected to SCADA and FDC systems.
PMS (Powder Moving System)
Flexible Heating Pipe
PTS (Powder Trap System)
EPD (Exhaust Pressure Detector)
3 Way N2 Curtain Valve
DIK (Duct Inspection Kit)
Heating Jacket
