Metrology Systems

Compitek offers services for Hitachi CD SEM and AMAT DR SEM inclusive of onsite troubleshooting, relocation of tools and sale of refurbished tools.

  • Models Supported*:
    • S88xx
    • S92xx,S93XX
    • CG4000
    • CG4100
    • RS3000
    • RS4000
    • Sem Vision CX, G2/4 and Complus
  • Training Courses to:
    • Provide training courses to engineers
    • Training modules can be customised to suit end-user requirements
  • Periodic Maintenance Packages via a team of experienced engineers to help end users conduct HYPM and PM
  • Consumable and Spare Parts
  • Fab Shutdown and Power up support
  • Parts and PCB repair and exchange
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